Vacuum chuck mechanism

Ideal for sample adsorption

Wafers can be adsorbed firmly without being scratched during transport, or and LCD glass substrates during high-speed rotation using a spin coater, etc.
Demand is gradually increasing for rotary feedthroughs for use in vacuum chucks because they offer the advantage of permitting vacuuming through them, thereby eliminating unnecessary space and, in addition, they can offer stable rotation.

Notes
Magnetic seals for Vacuum chucking are custom made products.
Please tell us chucked material, environment, temperature range, rotating speed, required shape, load and tolerance of size from here. We will advise you the best solution.

歡迎填寫下列Magnetic Seal 磁流體密封軸問卷調查，我們將有專人進一步與您連絡，謝謝您!