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●Magnetic Seal 磁流體密封軸

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Arc discharger
Contributing to nanotechnology. A typical nanotechnology (ultrafine technology) material is the c..
CVD equipment
Offering rotary feedthroughs that can withstand high-temperature inert gas. We are providing ..
Epitaxial growth system
Corresponding to the high-vacuum and the high-speed rotating in Epitaxial growth system. In Epi..
Etching systems
Developing rotary feedthroughs that can satisfy a wide range of specifications. A range of spec..
Gas-induction-mechanism
Introduction of gas from a rotary Feedthrough -- a barely known technique! The introductio..
Ion implanter
Transmitting high-speed rotation while minimizing center distortion and resonance. Rigaku's uni..
Roll-to-Roll Processing Equipment
For manufacturing flexible devices such as displays, lightings and solar cells Roll-to-rol..
Single crystal growth
Excellent magnetic field resistance. Pulling up crystal ingots exceeding 300 mm in diame..
Sputtering systems
Provides the vacuum rotary feedthrough with low magnetic flux leakage A lot of Rigaku rota..
Stirrer
Contributes to protecting the environment through water treatment Rigaku rotary feedthroug..
Vacuum chuck mechanism
Ideal for sample adsorption Wafers can be adsorbed firmly without being scratched during t..
Vacuum furnace, pressurized furnace
For a wide variety of furnaces besides the vacuum heat treating furnace 'Quenching' is a proces..
Vacuum transport robot
Proposing highly sophisticated robot seals. As applications for clean/vacuum robots become more..
X-ray generator
Contributing to the analyzing of a crystal structure. X-ray is generated from high-speed rotati..

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